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SPV-60Vacuum Plasma Cleaner

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Product Features

  • Military-grade welding process, strong cavity sealing, and high-density plasma source ensure uniform cleaning in all directions;
  • One-key start, precise control of important parameters such as test time, vacuum degree, power, etc.;
  • The ultra-low cleaning temperature of 45°C does not cause thermal influence and ensures stable treatment effect;
  • Dual or multi-channel process gas, gas control is stable;
  • Product description
  • Specification parameters
  • Hardware options
SPV-60 Vacuum Plasma Cleaner is designed for surface modification of small batch samples to achieve cleaning, modification and etching effects. It has the advantages of convenient movement, multiple configuration functions, stability and convenient operation.
working principle

Plasma surface treatment is to ionize the gas into plasma by applying sufficient energy to it. The "active" components of plasma include: ions, electrons, atoms, active genes, etc. Plasma treatment is to use the properties of these active components to treat the surface of the sample, so as to achieve cleaning, modification, etching and other purposes.
The structure of the vacuum plasma cleaning machine is mainly divided into five components: control system, excitation power system, vacuum chamber, process gas system, and vacuum pump system.
（A）Control System:The role of the control system is to control the operation of the entire atmospheric low-temperature plasma cleaning equipment and the protection of the overall system.
（B）Excitation power system:The generation of plasma requires high voltage excitation. Vacuum plasma is excited by radio frequency power supply (0-1000W) or intermediate frequency power supply (0-2000W). The frequency of radio frequency power supply is 13.56MHz, and the frequency of intermediate frequency power supply is 40KHz. The parameters can be adjusted according to the actual situation of the sample, and the modification effect can be achieved.
（C）Vacuum cavity:The role of the control system is to control the operation of the entire atmospheric low-temperature plasma cleaning equipment and the protection of the overall system.
The vacuum chamber is mainly divided into three materials: ①Stainless steel vacuum chamber ②Quartz chamber ③High-strength aluminum alloy chamber
Electrode plate placement method: ① Flat horizontal electrode type ② Flat vertical electrode type
Choose the cavity material and electrode plate placement method according to different industries and application fields.
（D）Process gas system:Standard two-way process gas, according to the different cleaning materials, can choose argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride gas.
（E）Vacuum pump system:The vacuum pump group is mainly divided into three types: ①oil pump ②Roots pump ③dry pump
The speed of vacuuming is one of the important factors that determine the working efficiency of a vacuum plasma cleaner. The speed of vacuuming mainly depends on the vacuum pump. The vacuum pump set is configured according to the vacuum degree and volume requirements of the measured sample.



Industry application


Industry-specific solutions
Metal industry applications
Resistive Fuses:Effectively remove organic pollutant particles on the surface and improve the reliability of glue injection.
Glass metal package socket:Effectively remove organic pollutant particles on the surface of the tube seat and improve the packaging stability.
The surface of some metal products needs to be coated, and the untreated surface has insufficient adhesion, resulting in weak and uneven coating. Plasma treatment can increase the adhesion of the metal surface, improve the surface uniformity, and avoid problems such as uneven coating and easy falling off.

Equipment video
Product Advantages

Vacuum chamber design with excellent sealing

Military-grade welding process, strong cavity sealing, large-capacity aluminum alloy cavity, generating high-density plasma, ensuring excellent cleaning effect.
Military-grade welding process, strong cavity sealing, large-capacity aluminum alloy cavity, generating high-density plasma, ensuring excellent cleaning effect.
01

Intelligent programmed control

PLC+7-inch LCD touch screen control system, one-key start, simple operation, can set a variety of experimental parameters, and accurately control important parameters such as test time, vacuum degree, power and so on.
PLC+7-inch LCD touch screen control system, one-key start, simple operation, can set a variety of experimental parameters, and accurately control important parameters such as test time, vacuum degree, power and so on.
02

Ultra low cleaning temperature

The vacuum chamber is made of aluminum alloy material, which has passed the vacuum leak detection test. The processing temperature is lower than 45 °C, and the pressure holding performance is excellent. It can meet the temperature requirements of different occasions and does not cause temperature effects on the cleaning products.
The vacuum chamber is made of aluminum alloy material, which has passed the vacuum leak detection test. The processing temperature is lower than 45 °C, and the pressure holding performance is excellent. It can meet the temperature requirements of different occasions and does not cause temperature effects on the cleaning products.
03

Patented discharge technology

The electrode has a hole design, which can increase the concentration and intensity of the plasma, and the equipment can process samples more efficiently. The unique patented discharge technology, special treatment and special structure of the discharge device ensure the formation of stable and uniform plasma.
The electrode has a hole design, which can increase the concentration and intensity of the plasma, and the equipment can process samples more efficiently. The unique patented discharge technology, special treatment and special structure of the discharge device ensure the formation of stable and uniform plasma.
04

One-click security guarantee

The one-key emergency stop protection button can quickly terminate the operation to minimize the damage to the sample caused by operation errors.
The one-key emergency stop protection button can quickly terminate the operation to minimize the damage to the sample caused by operation errors.
05
Application case
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